Ultra-high purity transducer WIKA

The WUD-2x series Ultra-high purity transducer WIKA combine state-of-the-art transducer concepts with analogue output signals. Thus the safest and most accurate pressure measurements necessary for today’s market requirements are provided.

Pressure measurement, based on a true vacuum reference, and electronic measures for interference shielding and signal noise cancellation ensure high-accuracy pressure measurement and excellent long-term stability.

Active temperature compensation reduces the impact of changing temperatures on the transducer, allowing safe operations even in applications with high fluctuations in temperature, e.g. Joule-Thomson effect in the case of gas expansion.

WUD-25 (flow-through) and WUD-26 (surface mount)transducers are specifically designed to sustain torsion applied stresses often incurred during installation. The special design of the thin-film sensor eliminates the risk of sensor failure due to loads at the process connection or welded joints.

Versatile

The WUD-2x can be readily installed in “on-tool” gas distribution systems. The bright LED display is rotatable and easy to read from any position.

Application-specific monitoring and control operations can be realized via two programmable switch outputs.

Compact

With its small footprint the WUD-2x is the most compact UHP transducer in the market. Thus it is optimally suited for installation in applications with limited mounting space, and even in existing plants, it can be easily retrofitted.

Applications

Semiconductor, flat panel display, and photovoltaic industry
Ultrapure gas supply in semiconductor production systems

Specifications

Measuring range

WUD-20, WUD-25, WUD-26:

2 – 4 – 7 – 11 – 17

WUD-20, WUD-25:

25 – 36 – 70 – 100 – 145 – 225 – 360
Absolute pressure: 0 … 2 bar to 0 … 60 bar
Vacuum pressure: -1 … 1 bar to -1 … 250 bar

Measuring principle

Metal thin-film sensor

Wetted

Process connection: 316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR) Sensor: 2.4711 / UNS R30003

Case

Lower body: 304 SS
Plastic components: PC/PBT
Keyboard: TPE
Display window: PC

Surface

finish Electropolished, typical Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7), per SEMI F19

Power supply U+

DC 10 … 30 V (with output signal 4 … 20 mA and DC 0 … 5 V)
DC 14 … 30 V (with output signal DC 0 … 10 V)

Output signal and maximum load

4 … 20 mA, 3-wire, RA ≤ (U+ – 10 V) / 0.02 A
DC 0 … 5 V, 3-wire, RA > 5 kΩ
DC 0 … 10 V, 3-wire, RA > 10 kΩ

Permissible temperature

Medium -20 … +100 °C [-4 … +212 °F]
Ambient -10 … +60 °C [14 … +140 °F]
Storage -10 … +60 °C [14 … +140 °F]

Data Sheet

Ultra-high purity transducer WIKA